Personnel Information

写真a

Hirai Yoshihiko


Job Title

Professor

Organization

Electronics Mathematics and Physics

Mail Address

E-mail address

Homepage URL

http://www.osakafu-u.ac.jp/

Faculty in charge, etc. 【 display / non-display

  • College of Engineering

  • Graduate School of Engineering, School of Engineering

Research field 【 display / non-display

  • Department of Physics and Electronics Engineering

Prize 【 display / non-display

  • Nanoimprint pioner award, 2015.11, International nanoimprint nanoprint conference

  • most impressive posper award, 2016.11, Microprocess and nanotechnology conference

 

Books 【 display / non-display

  • シランカップリング剤の使いこなしノウハウ集, 技術情報協会, 2016.01, No setting, 平井義彦

Papers 【 display / non-display

  • Stochastic Simulation of Pattern Formation in Electron Beam Lithography, J. Vac. Sci. Technol. B, 2018.11, M. Yasuda, M. Koyama, M. Shirai, H. Kawata, and Y. Hirai

  • Computational Study of Pattern Formation in UV Nanoimprint Lithography, J. Photopolym. Sci. Technol., 2018.06, T. Yamamoto, M. Yasuda, Y. Hirai, and H. Kawata

  • Transfer Printing by Use of Delayed UV Cure Resin for Fabricating Multilayer Structures, J. Photopolym. Sci. Technol., 2018.06, T. Yamamoto, M. Yasuda, Y. Hirai, and H. Kawata

  • Study on Induced Strain in Direct Nanoimprint Lithography, Jpn. J. Appl. Phys, 2018.03, K. Watanabe, T. Iida, M. Yasuda, H. Kawata, and Y. Hirai

  • Stochastic Simulation of the UV Curing Process in Nanoimprint Lithography: Pattern Size and Shape Effects in Sub-50 nm Lithography, J. Vac. Sci. Technol. B, 2017.11, M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda

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Charge of class subject 【 display / non-display

  • Selected Topics in Semiconductor Device Process

  • Advanced Semiconductor Device Process

  • Integrated Circuit Devices

  • Advanced Seminar in Physics and Electronics I

  • Introduction to Circuit Theory

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